INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 140)

MDC-360 DEPOSITION CONTROLLER
11-12 COMPUTER INTERFACE
Parameter Name Length
(bytes)
Decimal Pt.
Position
Range Units
Number of Pockets 1 None * (1-8)
Shutter Relay Type 1
ly closed,
one * 44=Normally open, N
45=Normal
46=None
Control 1 None * 68=Direct,
69=BCD,
70=Indiv,
71=Manual
Drive 1 None * 60=Up,
61=Down,
62=Fast,
63=Inline,
64=Sngl Step,
65=Dbl Step
Feedback input type 1
k
* 8 =Individual,
9=BCD,
10=Single Home,
11=In Position,
12=No Feedbac
Rotator Delay 1 seconds * (0-99)
Source voltage range 1 Volts * (16=2.5V, 17=5.0V,
18=10V)
Shutter Delay 2 sec * (0-99) LSByte first .1
Total 9 ytes b
There are a total of four so
All 36 bytes are sent in the sam urces ith 9
e essage starting
ct the contr r to send the source setup parameter list the
computer would send:
Chr$(255)+Chr$(254)+Chr$(1) 37)
20. Receive source setup (Code #19)
Instructs the controller to enter the inco to
memory. A description of the source s ve.
up (Code # )
Instructs the controller to send the sens r all sensors. A
description of the sensor parameter list
w
m
bytes per source for a total of 36 bytes.
with source #1.
Example: To instru olle
+Chr$(18)+Chr$(0)+Chr$(2
ming source setup parameters in
etup parameter list is given abo
21. Send sensor set 20
or setup parameter list fo
is as follows:
Parameter Name Length
(bytes)
Decimal Pt.
Position
Range Units
Number of crystals 1 (1-8) None *
Shutter Relay Type 1 44=Normally open,
45=Normall *
y closed,
None