INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 68)

MDC-360 DEPOSITION CONTROLLER
4-36
NO used.
6. Rotator 0 t ond
This param s ere ions. If the feedback type is “None”
(Not recom nded. S ons nstallation section.) this parameter tells
the control how lon t as the crystal is in position. If position
feedback is provided, this parame the ler how long it should wait
for the crys to reach t p befo es a Sensor Fault message.
4.3.3.6 EDIT SOURCE SETUP
Selecting E Source ill he S etup screen as shown in
Figure 4-12. In this screen you first select the source setup you wish to edit. To
select a sou
e Up-arrow an wn-arrow keys, then press the Right-
arrow or E r key to
FEEDBACK - No crystal position feedback is
Delay (
eter serve
o 99 sec
two diff
s)
nt funct
me ee cauti in the I
ler g to wai suming
ter tells
control
tal its targe osition re it issu
dit Setup w present t ource S
rce, use th
nte
d Do
select.
PROGRAMMING AND CONTROLLER SETUP
Figure 4-12 Source Setup screen
Once selected, the source is configured with the following parameters located on
the right side of the display:
1. Number of Pockets (1 to 8)
., N.C., None)
This parameter defines the shutter relay type used to control the source shutter.
re available:
utter. For this type, a
e crea ce to the shutter actuator.
.C. - Relay is normally closed and open
ourceN Shutter” output will be create he shutter actuator.
one - No sensor shutter output is created.
This parameter defines the amount of time allowed for the source shutter to close.
Source Volta
Source Setup: Number of Pockets 6
Shutter Relay Type N.O.
>Source #1< Shutter Delay (sec) 0.0
Source #2 Control Direct
Source #3 Drive Up
Source #4 Feedback Type Indv Pos
Pocket Delay (sec) 10
ge 10V
This parameter defines the number of pockets, or crucibles, available for the
source. The default value is 1 for a single pocket source.
2. Shutter Relay type (N.O
The following three relay types a
N.O. - Relay is normally open and closes to close sh
“SourceN Shutter” output will b
ted to interfa
N s to close shutter. For this type, a
“S d to interface to t
N
3. Shutter Delay (sec) (0.0 to 9.9 seconds)