INFICON MDC-360 Thin Film Deposition Controller User Manual
Page 145
MDC-360 DEPOSITION CONTROLLER
11-17
COMPUTER INTERFACE
28. Receive Action setup (Code #27)
Inst
enter the
parameters for Ac
into
ption of the Action para
ter list is given above.
ader, Address, Instruction=27, Length=26,Action #(0-15),1 byte
Type, 24 byte condition, Checksum
ller status (Code #28)
structs the controller to send the
a list. A description of the
ontroller status data list is as follows:
ructs the controller to
incoming Action
tion #n
memory. A descri
me
Format: He
Action
29. Send contro
In
controller status dat
c
Parameter Name
Length
(bytes)
Range
Controller state
1
0 = Process ready
1 = Start layer
2 = Change pocket
3 = Change crystal
4 = Layer ready
5 = Soak rise
6 = Soak hold
9 = Establish rate
11 = Deposit #1
14 = Rate ramp #2
it #3
18 = Rate ramp #4
5
d
e
lete
te
7 = Rise to Predeposit
8 = Predeposit hold
10 = Shutter Delay
12 = Rate ramp #1
13 = Deposit #2
15 = Depos
16 = Rate ramp #3
17 = Deposit #3
19 = Deposit #
20 = Ramp to feed
l
21 = Feed ho
22 = Ramp to idl
23 = Layer comp
24 = Process comple
me
25 = Process resu
Abort Process Errors
in
ax
1
bit 6 = Max Rate&M
bit 7 = Min Rate&M
Pwr
Pwr
Alarm 1 Error
Setup Co
tput Setup Co
s
1
bit 0 = A
bit 1 =Ou
ction
rrupted
rrupted
bit 2 = Input Setup Corrupted
bit 3 = Crystal Fail, Process Halted
bit 4 = Rate Establish Error
bit 5 = Active Layer Corrupted
bit 6 = Active Process Corrupted