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INFICON MDC-360 Thin Film Deposition Controller User Manual

Page 145

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MDC-360 DEPOSITION CONTROLLER

11-17

COMPUTER INTERFACE

28. Receive Action setup (Code #27)

Inst

enter the

parameters for Ac

into

ption of the Action para

ter list is given above.

ader, Address, Instruction=27, Length=26,Action #(0-15),1 byte

Type, 24 byte condition, Checksum

ller status (Code #28)

structs the controller to send the

a list. A description of the

ontroller status data list is as follows:

ructs the controller to

incoming Action

tion #n

memory. A descri

me

Format: He
Action

29. Send contro

In

controller status dat

c

Parameter Name

Length

(bytes)

Range

Controller state

1

0 = Process ready
1 = Start layer
2 = Change pocket
3 = Change crystal
4 = Layer ready
5 = Soak rise
6 = Soak hold

9 = Establish rate

11 = Deposit #1

14 = Rate ramp #2

it #3

18 = Rate ramp #4

5

d

e

lete

te

7 = Rise to Predeposit
8 = Predeposit hold

10 = Shutter Delay

12 = Rate ramp #1
13 = Deposit #2

15 = Depos
16 = Rate ramp #3
17 = Deposit #3

19 = Deposit #
20 = Ramp to feed

l

21 = Feed ho
22 = Ramp to idl
23 = Layer comp
24 = Process comple

me

25 = Process resu

Abort Process Errors

in

ax

1

bit 6 = Max Rate&M
bit 7 = Min Rate&M

Pwr
Pwr

Alarm 1 Error

Setup Co

tput Setup Co

s

1

bit 0 = A
bit 1 =Ou

ction

rrupted

rrupted

bit 2 = Input Setup Corrupted
bit 3 = Crystal Fail, Process Halted
bit 4 = Rate Establish Error
bit 5 = Active Layer Corrupted
bit 6 = Active Process Corrupted