INFICON MDC-360 Thin Film Deposition Controller User Manual
Page 137
MDC-360 DEPOSITION CONTROLLER
11-9
COMPUTER INTERFACE
Exa
he con
terial lis
Chr$(255)+Chr$(254)+Chr$(1
MDC’s message length is li
to 249 by
ller will return
al list in two messages. The
message will contain material names
the second message will contain material na
17-32.
d number of undefined layers (Code #9)
the controller to send the num
of undefin
yers to the host
er.
: Header, Address, Instruction=9, Length=0, Checksum.
ber of undefined
s instructio
255)+Chr$(254)+Chr$(1
ill return a message with
llowing fo
ader, Address, Instruction=
ngth=2, #Lyrs(2 bytes), Checksum.
ss (Code #10)
troller to send all the
ss parame
cess# n to the
description of the process parameter list is as follows:
mple: To instruct t
troller to send the ma
t the computer would
send:
)+Chr$(8)+Chr$(0)+Chr$(247)
Since the
eri
mited
tes, the contro
the mat
1-16 and
first
mes
10. Sen
Instructs
ber
ed la
comput
Format
Example: Send num
layer
n:
Chr$(
)+Chr$(9)+Chr$(0)+Chr$(246)
Controller w
the fo
rmat:
He
9, Le
11. Send proce
Instructs the con
proce
ters for pro
host computer. A
Parameter Name
Length (bytes)
Decimal Pt.
Position
Range
Units
Process #
1
(0-98)
None
*
Process name
12
Characters None
*
Edit Password
4
Characters None
*
View/Run Password
4
Characters None
*
Number of Layers
2
(0-998)
None
*
Total
23 bytes
All of the layer data for process #n wi
ow the ab
e. Since the
ngth is limited
9 bytes, th
r will send the
up to 17 separa
ssages depending on the number of
yers in the process. Each message will contain from one to 60 layers. For
ill send the layer data
message
ll foll
ove messag
MDC-360’s message le
to 24
e controlle
layer data in from one
te me
la
example, if the process contains 250 layers, the controller w
in five messages. The first four message will have 60 layers and the last
will have 10 layers. The format of the layer messages is as follows:
Parameter Name
Length (bytes)
Decimal Pt.
Position
Range
Units
Messag
ne
e Number
1
*
(1-17)
No
Layer # n Thickness
3
3
(0-999900) Å
Layer # n Material #
1
*
(0-31)
None