INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 7)

8.3.2 VOLTAGE SELECTION ............................................................................................ 8-1
8.3.3 GROUND LUG.......................................................................................................... 8-2
8.3.4 REMOTE POWER HANDSET................................................................................... 8-2
8.3.5 SOURCE-SENSOR .................................................................................................... 8-2
8.3.6 RS-232 COMMUNICATION...................................................................................... 8-2
8.3.7 DISCRETE INPUT/OUTPUT .................................................................................... 8-3
8.3.8 DIGITAL-TO-ANALOG CONVERTER (DAC) .......................................................... 8-3
9. SYSTEM INSTALLATION ............................................................................................. 9-1
9.1 SENSOR HEAD DESCRIPTION .................................................................................. 9-1
9.2 SENSOR HEAD INSTALLATION ............................................................................... 9-1
9.3 SENSOR OSCILLATOR ............................................................................................... 9-2
9.3.1 INSTALLATION......................................................................................................... 9-2
9.4 INSTRUMENTATION FEEDTHROUGH.................................................................... 9-2
9.5 SENSOR CRYSTAL REPLACEMENT ........................................................................ 9-2
9.6 TYPICAL SYSTEM INSTALLATION......................................................................... 9-3
10. THEORY OF OPERATION ......................................................................................10-1
10.1 BASIC MEASUREMENT ............................................................................................10-1
10.2 FILM THICKNESS CALCULATION..........................................................................10-1
10.3 CRYSTAL HEALTH CALCULATION .......................................................................10-3
10.4 RATE CALCULATION................................................................................................10-4
10.5 RATE CONTROL .........................................................................................................10-4
10.6 EMPIRICAL CALIBRATION......................................................................................10-4
10.6.1 FILM DENSITY....................................................................................................10-4
10.6.2 TOOLING FACTOR.............................................................................................10-5
10.6.3 ACOUSTIC IMPEDANCE ...................................................................................10-5
11. COMPUTER INTERFACE........................................................................................11-1
11.1 GENERAL.....................................................................................................................11-1
11.2 RS-232 SERIAL INTERFACE .....................................................................................11-1
11.3 RS-485 SERIAL INTERFACE .....................................................................................11-1
11.4 IEEE-488 PARALLEL INTERFACE ...........................................................................11-2
11.5 PROTOCOL ..................................................................................................................11-2
11.6 DATA TYPES ...............................................................................................................11-3
11.7 MESSAGE RECEIVED STATUS ................................................................................11-3
11.8 INSTRUCTION SUMMARY .......................................................................................11-4
11.9 INSTRUCTION DESCRIPTIONS................................................................................11-5
12. REPAIR AND MAINTENANCE...............................................................................12-1
12.1 HANDLING PRECAUTIONS......................................................................................12-1
12.2 MAINTENANCE PHILOSOPHY ................................................................................12-1
12.3 TROUBLE SHOOTING AIDS .....................................................................................12-2
12.4 RETURNING THE MDC-360 TO THE FACTORY....................................................12-3
13. APPENDIX A...............................................................................................................13-1
14. APPENDIX B – PARAMETER TEMPLATES ........................................................14-2
14.1 MATERIAL...................................................................................................................14-3
14.2 PROCESS......................................................................................................................14-5
14.3 DISPLAY SETUP .........................................................................................................14-6
14.4 INPUTS .........................................................................................................................14-7
14.5 OUTPUTS .....................................................................................................................14-8
14.6 ACTIONS ......................................................................................................................14-9
14.7 SENSOR SETUP.........................................................................................................14-10
14.8 SOURCE SETUP ........................................................................................................14-10
14.9 DAC SETUP................................................................................................................14-11
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