Status displays, Status displays -3, Figure 5-3 rate vs. time graph -3 – INFICON MDC-360 Thin Film Deposition Controller User Manual

Page 77: Figure 5-4 rate deviation vs. time graph -3, Figure 5-5 thickness vs. time graph -3

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MDC-360 DEPOSITION CONTROLLER

5-3

5.5 STATUS

DISPLAYS

There are six different run time status screens that can be displayed at any time
pressing the Status key (providing they have each been enabl

ed using Edit

Display Setup). The first key press will bring up the last viewed status screen,
repeatedly pressing the Status key will cycle through the six status screens, show
below.

OPERATING THE MDC-360

Figure 5-3 Rate vs. Time Graph

Figure 5-4 Rate Deviation vs. Time graph

Figure 5-5 Thickness vs. Time Graph

Sample Cr Process Ready
10
R
a
t
e

0 1

Sample Cr Process Ready
20
R D
a e
t v 1
e %

0

Sample Cr Process Ready
999
T
h
i
c
k
0 1

Displays the current
process name.

Displays the current
material name.