INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 148)

MDC-360 DEPOSITION CONTROLLER
Power 4 String %
Thickness 5 String KÅ
Deposition rate 4 String Å/sec
Time to go 7 String Seconds
Crystal health 2 String %
Layer number 3 String None
Rate deviation 4 String %
Active process number 1 BCD (0-98)
Active material
number 1 BCD (0-31)
Active sensor number 1 BCD (1-4)
Active crystal number 1 BCD (1-8)
Active source number 1 BCD (1-4)
Active pocket number 1 BCD (1-8)
Total 35 bytes
The string values are in ASCII format including decimal points or colons.
Example: To instruct the controller to send the run-time value list the computer
would send:
Chr$(255)+Chr$(254)+Chr$(1)+Chr$(30)+Chr$(0)+Chr$(225)
32. Initiate Automatic Data Logging (Code #31)
This operation allows the computer to setup the MDC-360 to automatically output
selected values to the RS232 port every 100 milliseconds. The values sent are
determined by the bit value of the message byte in the data logging instruction
message.
Byte # Bit # Description Length(bytes) Format Units
1 0 Power 4 String %
1 Thickness 5 String KÅ
2 Deposition rate 4 String Å/sec
3 Time to go 7 String Seconds
4 Crystal health 2 String %
5 Layer number 3 String None
6 Rate deviation 4 String %
All values are in ASCII format including decimal points or colons.
For example, to instruct the MDC to output rate and power the computer would
send the following message:
Chr$(255)+Chr$(254)+Chr$(1)+Chr$(31)+Chr$(1)+Chr$(5)+Chr$(218)
Data logging is stopped by sending the following message:
Chr$(255)+Chr$(254)+Chr$(1)+Chr$(31)+Chr$(0)+Chr$(224)
33. Internal Command
COMPUTER INTERFACE 11-20