INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 53)

MDC-360 DEPOSITION CONTROLLER
4-21 PROGRAMMING AND CONTROLLER SETUP
This parameter defines the fourth deposition rate.
30. Ramp Start Thk #4 (0.000 to 9999.)
lue to trigger the start of the fourth rate
nt
)
ce power level during the feed state.
required for the deposit power to be at Maximum or
This parameter determines the thickness va
ramp. A value of 999.9 will disable the rate ramp function.
31. Ramp Stop Thk #4 (0.000 to 999.9)
This parameter defines the ending thickness for rate ramp #4.
32. Time Setpoint (0 to 9:59:59)
This parameter defines the time from the start of the layer until the time setpoi
event is triggered.
33. Ramp To Feed Time (0 to 9:59:59
This parameter defines the time allowed for the source power to go from the last
deposition power to the Feed Power. The default for this parameter is zero.
34. Feed Power (00.0 to 99.9%)
The Feed Power parameter defines the sour
35. Feed Time (0 to 9:59:59)
The Feed Time parameter sets the feed time. This parameter can also be used as a
delay between the deposit state and the idle state. The default for this parameter
is zero which disables the feed function.
36. Ramp To Idle Time (0 to 9:59:59)
This parameter defines the time allowed for the source power to go from the last
deposition power or feed power to the Idle Power. The default for this parameter
is zero.
37. Idle Power (00.0 to 99.9%)
This parameter defines the source power after the feed or deposit states until the
next Soak or abort state. If the idle power is greater than zero then the next layer
using this source and pocket will start from the Predeposit state. If any
subsequent layer uses the same source but a different pocket, the idle power will
be automatically set to zero.
38. Maximum Power (00.0 to 99.9%)
The maximum power parameter sets the maximum allowable source power for
this material. The deposition power will not be allowed to exceed this value.
39. Power Alarm Delay (0 to 99)
This parameter sets the time
Minimum power before the alarm will be triggered.
40. Minimum Power (00.0 to 99.9%)
This parameter sets the minimum power level for the minimum power warnings.
If the power is at or below this level during a deposit a Minimum Power attention
warning will be given. If this condition remains true for longer than the time set