INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 149)

MDC-360 DEPOSITION CONTROLLER
11-21 COMPUTER INTERFACE
34. Set Active Source Power (Code #33)
power value into the active
the controller is in the manual power
al power parameter list is as follows:
Instructs the controller to enter the incoming source
source power. This command only works if
control mode. A description of the manu
Parameter Name Length (bytes) Allowable Range
Source Power 2 (0-999) units are 0.1%
Total 2 bytes
For example, to set the source power to 50% the computer would send the
following message:
Chr$(255)+Chr$(254)+Chr$(1)+Chr$(33)+Chr$(2)+Chr$(1)+Chr$(244)+
Chr$(231)
35. Internal Command
36. Internal Command
37. Send Process Log Directory (Code #36)
Instructs the controller to send the process log directory to the host computer.
This command is only valid on controllers with the internal data log storage
option installed. The process log directory consists of 16 individual process logs.
nge
The data format of a process log is listed in the following table:
Parameter Name Length (bytes) Allowable Ra
Process Log Name 12 All ASCII Characters
Process Run Number 2 (1-9999)
Starting Time 3 (00:00:00-23:59:59)
HH:MM:SS
Starting Date 3 (01/01/00-12/31/99)
MM:DD:YY
Completion Time 3 (00:00:00-23:59:59)
HH:MM:SS
Completion Status 1 (0=Normal, 1=Aborted
2=Running, 3=Overrun ,
)
Data Points/Minute 1 (38=30ppm, 39=60ppm,
ppm, 40=120ppm, 41=300
42=600ppm)
Starting Layer Number 2 (0-999)
Ending Layer Number 2 (0-999)
Total 29 bytes
The time and date data is in an unpacked BCD format. The four most significant
bits of a byte is the first digit’s value and the four least significant bits is the
second digit’s value. For example, a byte value of 41 decimal equates to a first