INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 15)

MDC-360 DEPOSITION CONTROLLER
1.3.7 INPUT/OUTPUT CAPABILITY
Sensor Inputs 2 Standard and 2 optional BNC inputs
Source Outputs 2 Standard and 2 optional fully
isolated, 2.5, 5, 10 volts @ 20 ma.
0.002% resolution
Discrete Inputs 8 Standard and 8 optional fully
programmable inputs.
The Passive I/O card (PN#179216)
has TTL level inputs activated by a
short across the input pins.
The Active I/O card (PN#179239) has
inputs activated by 12 to 120 volt
AC/DC across the input pins.
Discrete Outputs 8 standard and 8 optional fully
programmable, SPST relay, 120VA,
2A max.
Abort Output 1 standard and 1 optional SPST
Relay, 120VA, 2A max.
Remote Power Handset Front panel, RJH jack
RS-232 Communication Rear panel, 9 pin, Full duplex, DTE
Front panel, RJ11 jack, Full duplex
DAC Recorder Outputs Two 0 to 5 volts, 0.02% resolution
1.3.8 SENSOR PARAMETERS
Number of Crystals 1 to 8
Shutter Relay Type Normally open, normally closed,
dual, or none.
Position Control Manual, direct, BCD, or individual.
Position Drive Up, down, Fast, inline, single step, or
double step.
Feedback Type Individual, BCD, single home, in
position, or no feedback.
Rotator Delay 0 to 99 sec
1.3.9 SOURCE PARAMETERS
Number of Pockets 1 to 8
Shutter Relay Type Normally open, normally closed, or
none.
Shutter Delay 0.0 to 9.9 sec
Position Control Manual, direct, BCD, or individual.
Position Drive Up, down, Fast, inline, single step, or
double step.
Feedback Type Individual, BCD, single home, in
position, or no feedback.
GENERAL DESCRIPTION 1-5