INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 69)

MDC-360 DEPOSITION CONTROLLER
4-37 PROGRAMMING AND CONTROLLER SETUP
4. Control (Manual, Direct, BCD, Indv)
nder control of the MDC-360. Under manual
control, the MDC-360 will stop the process upon the completion of the current
layer when the next layer requires a different pocket. A message prompting the
operator with the material required is displayed in the Parameter/Status window.
Once the pocket has been changed, the process is resumed by pressing the Start
key.
BCD and Indv are used when control is through an external pocket rotation
controller which accepts Binary Coded Decimal inputs or Individual switch
closures to select the pocket. The controller creates the number of outputs
required to interface with the external controller and sets the outputs as required
to signal a pocket change.
Direct is used when the actuating device is driven directly. In this case th
ts, one for each available direction, to drive a
otor or solenoid.
Step)
ive types, the controller sets up one
doubly pulsed to actuate a solenoid to sequentially
r
s
e or more of the following outputs depending on the
ck)
al position feedback. This feedback type uses one input
inputs would be false except the input
osition number two.
This parameter defines the type of pocket control utilized.
Manual, as it implies, means not u
e
controller sets up one or two outpu
m
5. Drive (Up, Down, Fast, Inline, Sngl Step, Dbl
When the Control type is Direct, this parameter defines the drive method or
direction. For Sngl Step and Dbl Step dr
output which is either singly or
step the rotator to the desired position. For Up and Down drive types, the
controller sets up one output to control a drive motor which is turned on until the
rotator reaches the desired position. For Fast and Inline drive types, the controller
sets up a drive up and a drive down output. For the Fast drive type, the controlle
determines the fastest direction to the target pocket position and turns on the
appropriate output. The Inline drive type, informs the controller that continuou
travel in one direction is not possible. Therefore to get from position 6 to 1, the
direction must be down through 5, 4, etc. until 1 is reached.
The controller creates on
type:
Drive Up
Drive Down
Step
6. Feedback Type (Individual, BCD, Single Home, In Position, No Feedba
This parameter defines the type of feedback for a multiple pocket source. The
three feedback types available are as follows:
Individual - Individu
for each pocket position in the source. All inputs are normally false (open
circuit) unless the respective pocket is in position then that input is true
(closed to ground). For example, a six pocket source would use six inputs. If
pocket two was in position then all the
connected to feedback p