INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 4)

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Table of Contents
1. GENERAL DESCRIPTION ............................................................................................. 1-1
1.1 PURPOSE ....................................................................................................................... 1-1
1.2 FEATURES .................................................................................................................... 1-1
1.2.1 EXTENSIVE PROGRAM STORAGE ......................................................................... 1-1
1.2.2 DYNAMIC MEASUREMENT UPDATE RATE .......................................................... 1-1
1.2.3 SUPERIOR GRAPHICS DISPLAY ............................................................................ 1-1
1.2.4 PROGRAM SECURITY.............................................................................................. 1-1
1.2.5 DESIGNED FOR UNATTENDED OPERATION ...................................................... 1-1
1.2.6 FAIL SAFE ABORTS.................................................................................................. 1-1
1.2.7 ABORT STATUS RETENTION .................................................................................. 1-2
1.2.8 RUN COMPLETION ON CRYSTAL FAILURE ......................................................... 1-2
1.2.9 POWERFUL SYSTEM INTERFACE.......................................................................... 1-2
1.2.10 POWER SUPPLY NOISE TOLERANCE............................................................... 1-2
1.2.11 INTERNATIONAL STANDARD POWER CONNECTOR ..................................... 1-2
1.2.12 FIELD UPGRADABLE ......................................................................................... 1-2
1.3 SPECIFICATIONS......................................................................................................... 1-3
1.3.1 MEASUREMENT ....................................................................................................... 1-3
1.3.2 DISPLAY .................................................................................................................... 1-3
1.3.3 COMMUNICATION................................................................................................... 1-3
1.3.4 PROGRAM STORAGE CAPACITY ........................................................................... 1-3
1.3.5 PROCESS PARAMETERS ......................................................................................... 1-3
1.3.6 MATERIAL PARAMETERS ....................................................................................... 1-3
1.3.7 INPUT/OUTPUT CAPABILITY ................................................................................. 1-5
1.3.8 SENSOR PARAMETERS............................................................................................ 1-5
1.3.9 SOURCE PARAMETERS ........................................................................................... 1-5
1.3.10 RECORDER PARAMETERS ................................................................................. 1-6
1.3.11 UTILITY SETUP PARAMETER ............................................................................ 1-6
1.3.12 OTHER .................................................................................................................. 1-6
1.4 ACCESSORIES .............................................................................................................. 1-6
2. FRONT PANEL DISPLAYS AND CONTROLS ........................................................... 2-1
2.1 OPERATING DISPLAYS .............................................................................................. 2-1
2.1.1 RATE .......................................................................................................................... 2-1
2.1.2 POWER ...................................................................................................................... 2-1
2.1.3 THICKNESS ............................................................................................................... 2-1
2.1.4 LAYER NUMBER....................................................................................................... 2-1
2.1.5 CRYSTAL HEALTH % ............................................................................................... 2-1
2.1.6 TIME TO GO.............................................................................................................. 2-2
2.2 PARAMETER/STATUS DISPLAYS ............................................................................ 2-2
2.3 OPERATING CONTROLS ............................................................................................ 2-2
2.3.1 MANUAL KEY ........................................................................................................... 2-2
2.3.2 START KEY ................................................................................................................ 2-3
2.3.3 ABORT KEY ............................................................................................................... 2-3
2.3.4 RESET KEY................................................................................................................ 2-3
2.3.5 ZERO KEY ................................................................................................................. 2-3
2.3.6 SHUTTER KEY .......................................................................................................... 2-3
2.3.7 STATUS KEY.............................................................................................................. 2-3
2.3.8 ARROW KEYS ............................................................................................................ 2-4
2.3.9 PROGRAM KEY......................................................................................................... 2-4
2.3.10 ALPHANUMERIC KEYBOARD............................................................................ 2-5
3. BENCH CHECKOUT & INSPECTION ......................................................................... 3-1
3.1 INSPECTION ................................................................................................................. 3-1
3.2 INITIAL POWER UP..................................................................................................... 3-1