INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 146)

MDC-360 DEPOSITION CONTROLLER
11-18 COMPUTER INTERFACE
bit 7 = System Setup Corrupted
Alarm 2 Errors 1 bit 3 = Sound Alarm Action
bit 4 = Rate Deviation Alarm
bit 6 = Sensor Fault
bit 5 = Crystal Fail, Time Power Mode
bit 7 = Source Fault
Alert Errors 1 bit 3 = Sound Alert Action
bit 4 = Minimum Power Alert
bit 5 = Maximum Power Alert
bit 6 = Rate Deviation Alert
bit 7 = Crystal Marginal&Deposit
Attention 1 Errors 1 bit 0 = Process Complete
bit 1 = Minimum Power Attention
um Power Attention
ttention
Ma n Pro
bit 5 = Crystal Fail&! In Process
bit 6 = Crystal Mar
n Proce itch
bit 7 = Crystal Fail& cess, S
bit 2 = Maxim
bit 3 = Rate Deviation A
bit 4 = Crystal
rginal&!I cess
ginal&I ss, Sw
In Pro witch
Atte ion 2 Errors 1 bit 3 = Manual Crystal Change
bit 4 = Resume Pro
bit 5
ound Atten
bit 6 = Manual Poc nge
bit 7 ause on
nt
cess
= S tion
ket Cha
= P Layer Complete
Dis te In bit 0 = Input #1, ... ( 0=False, 1=True) cre put Register 1 1
Discrete Inp bit 0 = Input #9, ... ( 0=False, 1=True) ut Register 2 1
Dis e Ou
1
bit 0 = Output #1 e, 1=T e) cret tput Register 1 , ... ( 0=Fals ru
Dis e Ou
2
bit 0 = Output #9 e, 1=T e) cret tput Register 1 , ... ( 0=Fals ru
Controller Stat bit 0 eady M
bit 1 anual M
bit 2 = Time Pow
bit 3
old Mo
bit 4 alt Mod
bit 5 bort M
bit 6 ower C
bit 7 = In Proces
us 1 1 = R ode
= M ode
er Mode
d = H
= H e
e
o = A
= P de
ontrol Mode
s
Controller Status 2 1 bit 0 = Resume Process
bit 7 = Last Layer Of Process
bit 1 = Simulate Mode
bit 5 = Material Time Setpoint
bit 6 = Backup Sensor Active
Source #1 Pocket 1 (1-8)
Position
Source #2 Pocket
1 (1-8)