INFICON MDC-360 Thin Film Deposition Controller User Manual
Page 150
MDC-360 DEPOSITION CONTROLLER
11-22 COMPUTER INTERFACE
digit of 2 and a second digit of 9. The 2 comes from the four MSbits and the 9
comes from the four LSbits of the by
The process run num
normal
If the first byte of the process nam
log is considered blank.
d to 249 bytes, th
r will send
the process log directory data in two separate 232 by
e first
he first eight logs
he
last eight logs.
Example: To instruct the controller to se
computer would send:
Chr$(255)+Chr$(254)+Chr$(1)+
38. Send Process Log Data (Code #37
proce
y to the
only v
l data
s log number can range from
99. T
s log or a
ara
message t
r
e and the number of data po
lds
the data point set data. The following tab
material message type:
ng
ange
te.
ber and the starting and ending layer numbers are in the
MSbyte first BCD format.
e of any process log is equal to 255 then that
Since the MDC’s message length is limite
e controlle
te messages. Th
message will contain t
and the second message will contain t
nd the process log directory the
Chr$(36)+Chr$(0)+Chr$(219)
)
Instructs the controller to send the
host computer. This command is
log storage option installed. The proces
ss log data for log #n and layer #
alid on controllers with the interna
1-16 and the
layer number can range from 1 to 9
layer that doesn’t exist will result in p
for a process log is sent in two
material nam
rying to read an empty proces
meter out of range error. The layer data
ypes. The first type holds the laye
int sets stored. The second type ho
le shows the data format of the layer
Parameter Name
Le
th (bytes)
Allowable R
Layer Material Name
10
All ASCII Characters
Number of Data Point Sets
2
(1-27,000)
Total 12 bytes
Following the above message will be a n
ta
point set data. The following table shows the
e data point set
message type for one data point set:
umber of messages containing the da
data format of th