INFICON MDC-360 Thin Film Deposition Controller - Manual (Page 41)

MDC-360 DEPOSITION CONTROLLER
4-9 PROGRAMMING AND CONTROLLER SETUP
output “Senso N tal2 r Crys ” will be true while all the other position
e lse.
C-360 will create from one
of crystals. For example, an
utputs. If crystal one is
d cry l, all s will be false. If crystal four is the
tal, outputs o two will be true and output three
lse.
4.2.4.1
Rotator Delay - 30
MDC-360 will create six position
n the
uld
on
DC-
#12
hen using the standard 360 I/O board. When
e
4.2.5
The or
an inte
control
require
The fol
program
ram an
tical monitor. Go to the
Program Inputs screen and select a blank input. Name the input “Optical
outputs will b fa
b. BCD - With BCD format , the MD
to three outputs based on the number
eight crystal sensor head will use three o
the desire
sta output
e and desired crys n
will be fa
EXAMPLE USING MAXTEK’S RSH-600 SIX CRYSTAL SENSOR HEAD
The following is a list of the sensor parameter settings required to control
Maxtek’s RSH-600 six crystal sensor head.
Number of Crystals - 6
Shutter Relay Type - None
Control - Direct
Drive - Sngl Step
Feedback Type - Indiv
With the above parameter settings, the
feedback inputs called “SensorN CrystalX” where X ranges from 1 to 6.
These inputs should be connected to the six position feedback pins o
RSH-600 sensor head. Pin #1 of connector J1 on the sensor head sho
be connected to the “SensorN Crystal1” input on the MDC-360. Pin #2
the sensor head should be connected to “SensorN Crystal2” on the M
360 and so on. Pin #7 on the sensor head should be connected to pin
or any of the return pins w
using the 360 Active I/O board then pin #7 of the sensor head should b
connected to one side of a 115VAC source. The other side of the
115VAC source should be connected to the other side of the six position
feedback inputs on the 360.
INPUT, OUTPUT AND ACTION SETUP
MDC-360’s inputs, outputs and actions can be used to provide control for,
rface to all sorts of vacuum system peripherals such as PLC system
lers, substrate heaters, planetary rotators, etc. If your system doesn’t
any special interfacing or control then you can skip to the next section.
lowing are a few examples of some typical uses for the MDC-360’s
mable I/O’s and actions.
Optical Monitor Termination - To setup the MDC-360 to terminate the
deposit on a signal from an optical monitor, the first step is to prog
input that will be connected to an output in the op