INFICON XTC/C Thin Film Deposition Controller - Manual (Page 97)

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XTC/C - XTC/2 Operating Manual
R21. . . . . Trigger beeper
R22. . . . . Clear Error Flag
R23. . . . . Set 250ms DATA Ready Service request (IEEE only).
NOTE: A crystal fail automatically clears the 250ms service request.
R24. . . . . Clear 250ms DATA Ready Service request (IEEE only).
R25. . . . . Set upper frequency limit to 6.027 MHz.
The following additional commands are available on the XTC/C only:
R30. . . . . Test ON
R31. . . . . Test OFF
R32. . . . . Control Mode Deposit
R33. . . . . Control Mode Etch
R34. . . . . Stop on Alarms
R35. . . . . No Stop on Alarms
R36. . . . . Stop on Max Power
R37. . . . . No stop on Max Power
R38 x . . . Recorder Type x (0 = Rate 0 to 100 Å/s,
1 = Rate 0 to 1000 Å/s,
2 = Thickness 0 to 100 Å,
3 = Thickness 0 to 1000 Å,
4 = Power,
5 = Rate Deviation,
6 = Rate 0 to 100 Å/s smoothed,
7 = Rate 0 to 1000 Å/s smoothed)
R39. . . . . Set SECS Timer 1 (0.1 - 10.0)
R40. . . . . Set SECS Timer 2 (0.2 - 25.0)
R41. . . . . Set SECS Max Retries (0-31)
R42. . . . . Set SECS Duplicate Block to Yes
R43. . . . . Set SECS Duplicate Block to No