INFICON XTC/C Thin Film Deposition Controller User Manual
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XTC/C - XTC/2 Operating Manual
6— RATE DEVIATION GROUP
A graphic annunciator that displays the current deviation of the deposition
rate from the value of the active film’s DEP RATE parameter. This
annunciator structure is updated each 250ms measurement when the
display is in the Operate mode. A 0% deviation is indicated when the
computed value is less than +/-2%. The plus or minus 10% values are
indicated when the computed value is more than +/-10%, respectively.
7— ACTIVE CRYSTAL INDICATION GROUP
A graphic annunciator that provides information concerning the presently
active crystal or the availability of backup crystals. Its meaning is somewhat
altered by the instrument’s configuration regarding the crystal switch type,
see
a. If the instrument is configured for "Single Heads", the annunciator will
indicate which sensor is active.
b. If the instrument is configured for "Dual Sensor Head", the annunciator
will display the number representing the active crystal’s "sensor
number." Whenever the instrument is operating with the secondary
(backup) crystal the number of the backup crystal will be flashing as an
indication of the lack of a subsequent backup crystal.
c. If the instrument is configured for one or two CrystalSix, the annunciator
will display the numbers of all crystals of the active sensor’s output that
are "good." The "active" crystal’s number will flash. The absence of all
numbers may also indicate that the switcher is not operating.
8— STATUS MESSAGE GROUP
A group of annunciators that provide information concerning the state of
the instrument.
a. READY — when illuminated the instrument will accept a start command
to begin state processing of the active layer.
b. STOP — when illuminated indicates that the instrument is in the STOP
state, see
and
c. TIME PWR — when illuminated indicates that the instrument is in the
Time-Power state. See
d. CONTINUE — when illuminated the instrument will again execute state
processing of the active layer, allowing for any previously accumulated
material, when the START key is pressed. Pressing the RESET key prior
to the START key resets the process to layer 1; see
.
e. MANUAL —when illuminated the instrument is in the manual power
control mode and the source’s power level is modified by either the
optional hand controller or the front panel keys (XTC/2 only).
f. XTAL FAIL — this indicator illuminates when the active crystal has
failed. In the case of instruments configured for dual or CrystalSix
operation it indicates that no further crystals are available.