INFICON XTC/C Thin Film Deposition Controller User Manual
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XTC/C - XTC/2 Operating Manual
10.RATE RAMP
TIME
Rate control, desired rate
changing. [Thick Spt, New Rate,
R.Ramp Time]
Closed
Closed
Open
11.RATEWATCHER
(SAMPLE)
Rate control. [Sample %]
Closed
Closed
Open
12.RATEWATCHER
(HOLD)
Constant power, based on last
sample’s average power. [Hold
Time]
Closed
Open
Open
13.MANUAL
Source power controlled by hand
held controller.
Closed
Closed
Open
14.TIME-POWER
Crystal failed; source maintained at
average control power prior to
crystal failure. [Time Pwr Y]
Closed
Closed
Open
NOTE: 15 through 16 are Post-Deposit states.
15.IDLE RAMP
Source changing to Idle Power.
[Idle Ramp]
Open
Open
Open
16a. IDLE POWER
(=0%)
Source maintained at zero power;
will accept a START command.
[Idle Pwr]
Open
Open
Open
16b. IDLE POWER
(>0%)
Source resting at Idle Power; will
accept a START command.
Open
Open
Open
NOTE: The STOP state—instrument will accept a START provided a Crystal Fail has
not occurred. See also
Table 4-1 State Descriptions (continued)
STATE
CONDITION
RELAY CONTACT STATUS
Source
Shutter
Sensor
Shutter
Feed