INFICON XTC/C Thin Film Deposition Controller User Manual
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XTC/C - XTC/2 Operating Manual
S13 . . . . . Raw frequency - Frequency of crystal being read. xxxxxxx.x Hz
[negative of last good frequency if failed]
S14 . . . . . Xtal Fail - Returns ASCII 1 if currently failed crystal, 0 if not.
S15 . . . . . Max Power - Returns ASCII 1 if currently outputting maximum power,
0 if not.
S16 . . . . . Crystal switching - Returns ASCII 1 if currently crystal switching, 0 if
not.
S17 . . . . . End of process - Returns ASCII 1 if process has ended, 0 if not.
S18 . . . . . STOP - Returns ASCII 1 if process is in STOP.
S19 . . . . . DATALOG - Returns the datalog string, refer to
for details. Data is separated by spaces instead of CR/LF.
The last byte returned identifies the End on Time Power or Normal
Completion information as 1 or 0 respectively. Also, when using the
S19 command the "Begin Process" and "End Process" messages
are not returned.
S20 . . . . . Present Configuration Switch Settings - returns 16 ASCII bytes with
a value of 0 or 1, corresponding to the position of configuration
switches 1-16; byte 1 corresponds to switch 1.
Also see S22 below.
NOTE: Switch settings do not take effect until a power STBY/Power
On sequence takes place.
S21 . . . . . Error Flag - If more than one error code exists, the response string
will return them all, each separated by a single space.
S22 . . . . . Instrument configuration readout - the position of the configuration
switches at the last STBY/ON sequence. Also see S20 above and
.
S30 . . . . . Returns status of each crystal of a multi-head sensor.
S31 . . . . . Returns a rolling 6.25 second average (updated every 0.25 seconds)
of the measurement rate.
16 15 14 13 12 11 10
9
8
7
6
5
4
3
2
1
1 = Switch On
S21 Response Codes
0
Error 0
2
Power Fail or STBY/ON sequence
9
Error 9
10
No Errors