5 aux i/o, Figure 2-14 on – INFICON XTC/C Thin Film Deposition Controller User Manual
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XTC/C - XTC/2 Operating Manual
2.6.5 AUX I/O
A 25-pin male "D" type connector for interface connection, see
.
Figure 2-14 25-Pin Type "D" Male Connector
Pin #
Function
Relay #
Outputs (Relays)
7
1,2
Thickness setpoint/End of Film*
8
3,4
Feedtime (SOAK 2)
9
5,6
Crystal fail
10
7,8
Alarms/In Process*
11
9,10
Source 1/Source 2 toggle (closed
when source 2 is active)
12
11,12
End Deposit
Input#
Inputs
13
Input common (GND)
9
14
Crucible valid
15,16,17
Input common (GND)
TTL Output #
Outputs (Open Collector 1 of 8 encoding)**
1
18
Crucible select 1
2
19
Crucible select 2
3
20
Crucible select 3
4
21
Crucible select 4
5
22
Crucible select 5
6
23
Crucible select 6
7
24
Crucible select 7
8
25
Crucible select 8
*NOTE: See description of configuration switch 13,
.
**NOTE: The crucible select outputs are available BCD encoded on the
Sensor 1 connector, see
.