INFICON XTC/C Thin Film Deposition Controller - Manual (Page 91)

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XTC/C - XTC/2 Operating Manual
Table 3-8 Parameter Definition Table (for Query and Update Commands)
PP XTC/2 Parameter Range
0 Rise Time 1 0 - 9959 or
00:00 - 99:59
1 Soak Power 1 0.0 - 100.0
2 Soak Time 1 (See 0)
3 Rise Time 2 (See 0)
4 Soak Power 2 (See 1)
5 Soak Time 2 (See 0)
6 Shutter Delay 1 or 0 or 'Y' or 'y' or 'N' or 'n'
7 New Rate 0.0 - 999.9
8 Rate Ramp Time (See 0)
9 Idle Ramp (See 0)
10 Idle Power 0.0 - 100.0
11 Time Power (See 6)
12 Xtal Switch S 0 - 9
13 Xtal Switch Q 0 - 9
14 Tool Factor 1 10 - 500.0
15 Tool Factor 2 (See 14)
16 Deposition Rate 0 - 999.9
17 Final Thickness 0.0 - 999.000
18 Thickness Spt (See 17)
19 Density 0.5 - 99.99
20 Z-Ratio .1 - 9.999
21 Sensor 1 - 2
22 Source 1 - 2
23 Crucible 0 - 8
24 Control Gain 0.01- 99.99
25 Control TC 0.1 - 100
26 Control DT 0.1 - 100
27 Max Power 0.0 - 100.0
28 Sample 0 - 99
29 Hold Time (See 0)
30-39 ** NOT USED **
40 Layer 1-3
1
, 0-9
2
99 All See note on page 3-25
1
May be 0 for Q command; if 0, will return values for layers 1 - 3.
2
0 not allowed for layer 1.