INFICON XTC/C Thin Film Deposition Controller - Manual (Page 92)

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XTC/C - XTC/2 Operating Manual
3.8.5.4 Update Command
The Update command replaces the current parameter value with the DATA
Sent.
To update film parameters the format of the update command is:
U pp F vvv - Parameter pp of film F, value vvv.
Update parameter pp of film F, with value vvv, a space is used as a delimiter
between the pp and F values as well as the F and vvv values, where F is a digit
between 1 and 9. Refer to
Table 3-8 on page 3-27 for a numbered list of
parameters and their limits.
NOTE: If pp is set to 99, the data is a list of all parameters in the order specified.
This command allows a rapid block transfer of data which is convenient
for downloading films. Each parameter value must be separated by a
space.
To update layers the format of the update command is:
U 40 L v
Where 40 designates a layer is to be updated. The value L indicates which layer
to update. The value of L can be 1, 2, or 3, and v designates the film number to
insert into layer L.
For example, the update command
U 40 1 4
will enter film number 4 into layer 1.
3.8.5.5 Status Command
Sends back information based on specific request made.
The format of the status command is:
S xx . . . . Return the status (value) of xx
where:
S . . . . . . Is the literal S
xx . . . . . One or two digit code per list below:
S0 . . . . . Process information. All the information from S1 to S10, separated
by spaces.
S1 . . . . . Rate (Å/s) currently read. x.x to xxx.x Å/s
S2 . . . . . Power (%) currently output. x.x to xxx.x %
S3 . . . . . Thickness (KÅ) currently accumulated. x.xxxx kÅ to xxxx.xxxx kЕ