INFICON XTC/C Thin Film Deposition Controller User Manual
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XTC/C - XTC/2 Operating Manual
S11 . . . . Output status - returns a string of 16 ASCII bytes, 1 per output. Each
byte has an ASCII value of 0 or 1, corresponding to the output status.
S12 . . . . Input status - returns 9 ASCII bytes, 1 per input. Each byte has an
ASCII value of 0 or 1, corresponding to the input’s status.
Position Outputs
1
Source Shutter 1
1=open, 0=closed
2
Source Shutter 2
1=open, 0=closed
3
Sensor Shutter 1
1=open, 0=closed
4
Sensor Shutter 2
1=open, 0=closed
5
Stop
1=stop, 0=not stop
6
End of Process
1=end of process
0=not end of process
7
Thickness Setpoint
1=Thk Setpoint
8
Feedtime (Soak 2)
1=soak 2 phase
9
Crystal Fail
1=Xtal Fail
10
Alarms
1=Alarm Cond.
11
Source 1/Source 2
(toggle)
1=Source 2, 0=Source 1
12
End Deposit
1=closed
13
Crucible Select (LSB)
14
Crucible Select
binary value encoding
15
Crucible Select (MSB)
16
Unused
Input #
Function
1
Start
2
Stop
3
End
4
Sample Initiate
5
Sample Inhibit
6
Crystal Fail Inhibit
7
Zero Thickness
8
Soak 2 Hold
9
Crucible Valid?
9
8
7
6
5
4
3
2
1
0 = grounded (active)