INFICON XTC/C Thin Film Deposition Controller - Manual (Page 79)

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XTC/C - XTC/2 Operating Manual
3.7 Input and Output Details
3.7.1 Relays
WARNING
The relay, relay circuit, and associated pins in the I/O
connector(s) have a maximum voltage rating of
30 V(dc) or 30 V(ac) RMS or 42 V(peak). The maximum
current rating per connector pin or relay contact is
2.5 Amps.
Their function is as follows:
Table 3-3 System I/O Connector
Relay # Pin # Function** Closed Contacts Open Contacts
1 1,2 Source Shutter 1 During Deposit and
Manual states when
source 1 is designated. Balance
2 3,4 Source Shutter 2 During Deposit and
Manual states when
Source 2 is
designated. Balance
3 5,6 Sensor Shutter 1 During the following
states when the
designated sensor is
active: Balance
Balance
4 7,8 Sensor Shutter 2
- RateWatcher Sample
- Deposit
- Manual
- CrystalSwitch to dual
head backup
- Pulses during
CrystalSix transitions
- Shutter delay