INFICON XTC/C Thin Film Deposition Controller - Manual (Page 169)

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XTC/C - XTC/2 Operating Manual
11 Connect the six-inch BNC cable to the Feed-Through and disconnect it from
the Crystal Interface Unit (or Oscillator)
12 Verify electrical continuity from the center pin of the Microdot connector on
the Feed-Through to the un-terminated end of the six-inch BNC cable.
13 Verify electrical isolation from the center pin to electrical ground
(Feed-Through body).
If the Feed-Through/six-inch BNC cable system is found to be defective, look
for defective contacts at the Feed-Through to BNC cable connection. Repair or
replace the Feed-Through as necessary, re-attach the BNC cable to the XIU
and In-Vacuum cable to the Crystal head and repeat this procedure starting at
step 2.
6.5.1.3 Sensor Head Or Monitor Crystal
Diagnostic Procedure
1 Remove the Crystal Cover from the Sensor Head.
2 Refer to Figure 6-7 on page 6-18 . Connect the Crystal Sensor Emulator to
the Sensor Head at Point C.
Š If the XTAL Fail message disappears after approximately 5 sec. then the
Sensor Head is operating properly. Re-insert the Crystal Cover into the
Sensor Head and go to
section 6.5.1.3 on page 6-21 .
Š If the XTAL Fail message remains, continue at step 3.
3 Disconnect the In-Vacuum cable from the Sensor Head and the
Feed-Through. Remove the Crystal Sensor Emulator from the Sensor
Head.
4 Using an Ohm meter, verify the electrical connections on the Sensor Head.
Š Verify there is electrical continuity from the center pin contact on the
Microdot connector on the Sensor Head to the finger spring contact in
the Sensor Head.
Š There must be electrical isolation between the center pin of the Microdot
connector and the Sensor Head body.
If the Sensor Head is found to be defective, contact INFICON’s Service
Department to have the Sensor Head repaired.