INFICON XTC/C Thin Film Deposition Controller - Manual (Page 62)

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XTC/C - XTC/2 Operating Manual
For example, if the first layer of the process is 1000Å of copper it would be
convenient to dedicate film 1’s parameters to describing this particular layer of
the process.
These instruments allow up to nine individual film programs to be defined,
stored and recalled. When the display is in the program mode the particular
FILM # being modified is always visible (except when the S and Q parameters
are being programmed). The FILM # may be changed by moving the cursor to
that parameter and changing its value. When the display is in the operate mode
the film executing or about to execute is displayed as FILM #.
A START command will begin processing that film if it is not already processing
another film or in the STOP state. START commands are ignored if a film is
already processing.
2.8.1 Skipping a State Overview
It is not necessary to use all possible film states when a film is programmed.
Unwanted states will be executed in 250 ms if the film parameters which are
used to define the state are set to zero. The IDLE state of a film, however, will
always be executed. When the desired DEP RATE is programmed to zero, the
entire DEPOSIT state will be skipped (including any rate ramps). If no
parameters have been programmed, the film will immediately sequence to the
IDLE state when the START key is pressed.
2.8.2 Idle State Processing Overview
When a film program finishes in the IDLE state at a programmed IDLE PWR
level other than zero, a subsequent START command will initiate any film
program utilizing the same source output at the RISE TIME 2 state, skipping all
previous states, even if they were programmed. If RISE TIME 2 is not present
in the film, the instrument will sequence to the next viable state — SHUTR DLY,
DEPOSIT, IDLE RAMP or IDLE (in the stated order).
2.8.3 Manual Power Overview
The MANUAL state may be entered whenever the instrument is not in the
STOP or IDLE state by pressing the MPWR switch. The shutter will always
open and the FINAL THK event will be ignored. When the MANUAL control
state is ended, the unit will sequence to the DEPOSIT state, provided that the
FINAL THK limit has not been exceeded. Any thickness accumulated while the
unit has been in the MANUAL state will be retained and added to when the
DEPOSIT state is entered.
When the instrument is in the MANUAL state the control voltage output
(% Power on the display) may be increased or decreased either through the
Handheld Power Controller (optional) or the or the
or keys on the front
panel. The rate of change of source power is linearly ramped from 0.4% per