INFICON XTC/C Thin Film Deposition Controller - Manual (Page 130)

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XTC/C - XTC/2 Operating Manual
4.16 Start Layer Without
Backup Crystal Configuration
These instruments allow the option of automatically continuing a Process with
the "backup" sensor. In normal operation if the sensor fails during the Process,
the Process is automatically stopped and the crystal must be replaced in order
to continue. With Configuration Switch 11 on, the user is allowed to continue the
Process with the second, "backup", sensor. All CrystalSwitching or Complete
on Time Power functions work normally. The following examples further
elucidate various situations.
For example if using two single sensors and a crystal fails during the Layer, the
Layer will Complete on Time Power or STOP, XTAL FAIL, whichever is
programmed. If Configuration Switch 11 is on, the "backup" crystal is good, and
START is pressed, either the Layer will be continued, or the next Layer is
started.
If using a Dual head and a crystal fails while the Layer is in Deposit, the
instrument will "crystal switch" to the secondary crystal of the Dual Head and
complete the Layer. Then, with Configuration Switch 11 on, pressing START
will begin the next Layer in the Process using the "backup" crystal, even though
that Layer’s primary crystal is failed. When using a CrystalSix sensor, all 6
crystals must fail prior to using the "backup" crystal.
If using two single sensors or a dual sensor, whenever the "backup" crystal is
in use the XTAL # annunciator will flash. When using a CrystalSix, the
annunciator for the crystal currently in use will flash as always.
Additionally, if the instrument switches to the "backup" crystal during the
Process it will continue using the "backup" crystal until the Process is RESET,
even if the primary crystal is replaced. This may be circumvented by manually
crystal switching to the primary crystal once the failed crystal is replaced.