INFICON XTC/C Thin Film Deposition Controller - Manual (Page 157)

6 - 9
IP
N 07
4-
18
3X
XTC/C - XTC/2 Operating Manual
c. material does not adhere to
crystal c. make certain the crystal’s
surface is clean; avoid
touching crystal with fingers,
make use of an intermediate
adhesion layer
d. cyclic change in rate d. make certain source’s
sweep frequency is not
"beating" with the
measurement frequency
[nearly the same frequency or
a near multiple of the
measurement (4 Hz)]
7. large drift in thickness
(greater than 200 Å for a
density of 5.00 g/cc) after
termination of sputtering a. crystal heating due to poor
thermal contact a. clean or polish the crystal
seating surface on the crystal
holder
b. external magnetic field
interfering with the sensors
magnetic field (sputtering
sensor) b. rotate sensor magnet to
proper orientation with
external magnetic field, refer
to sputtering sensor manual
IPN 074-157
c. sensor magnet cracked or
demagnetized (sputtering
sensor) c. check sensor magnetic field
strength, the maximum field at
the center of the aperture
should be 700 gauss or
greater
8. CrystalSix, crystal switch
problem (does not advance or
not centered in aperture) a. loss of pneumatic supply, or
pressure is insufficient for
proper operation a. ensure air supply is
regulated at 80-90 PSI
b. operation has been
impaired as a result of
material accumulation on
cover b. clean material
accumulation as needed,
refer to CrystalSix manual IPN
074-155 for maintenance
c. improper alignment c. realign as per instructions in
CrystalSix manual IPN
074-155
d. 0.0225" diameter orifice not
installed on the supply side of
solenoid valve assembly d. install orifice as shown in
the CrystalSix manual IPN
074-155
Table 6-2 Troubleshooting Transducers/Sensors (continued)
SYMPTOM CAUSE REMEDY