INFICON XTC/C Thin Film Deposition Controller - Manual (Page 112)

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XTC/C - XTC/2 Operating Manual
The following variable parameters and their limits are listed below. If a value
outside the stated limits is attempted, the message ERR 1 is displayed.
Notes:
1. If configured for dual sensor, TOOL FACT 1 applies to primary sensor,
TOOL FACT 2 applies to secondary sensor. If configured for single or CrystalSix
sensor(s), TOOL FACT 1 is used regardles of whether sensor 1 or 2 is active.
2. Set to 0 for single crucible operation. If non-zero, instrument waits until Crucible Valid
input goes low before going into Rise.
Table 4-2 Limits for Film Parameters
PARAMETER LIMITS UNITS
Rise Time 1, 2 00:00 - 99:59 MIN:SEC
Soak PWR 1, 2 0.0 - 100 %
Soak Time 1, 2 00:00 - 99:59 MIN:SEC
Shutr DLY Yes or No --
NEW RATE 0.000 - 999.9 KÅ
R RAMP TIME 00:00 - 99:59 MIN:SEC
IDLE RAMP 00:00 - 99:59 MIN:SEC
IDLE PWR 0.0 - 100 %
TIME PWR Yes or No --
XTAL SWCH S, Q 0 - 9 Whole Numbers
TOOL FACT 1,2 10.0 - 500 % (see note 1)
DEP RATE 0.000 - 999.9 Å/SEC
FINAL THK 0.000 - 999.9 KÅ
THK SPT 0.000 - 999.9 KÅ
DENSITY 0.500 - 99.99 GM/CC
Z-RATIO 0.100 - 9.999 --
SENSOR # 1 or 2 --
SOURCE # 1 or 2 --
CRUCIBLE # 0 - 8 Whole Numbers (see note 2)
CTL GAIN 00.01 - 100.0 (Å/SEC)/%
CTL TC 0.1 - 100 SEC
CTL DT 0.1 - 100 SEC
MAXPWR 0.0 - 100 %
SAMPLE 0 - 99 %
HOLD TIME 00:00 - 99:59 MIN:SEC