INFICON XTC/C Thin Film Deposition Controller User Manual
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XTC/C - XTC/2 Operating Manual
10
RISE TIME 1 will be displayed, the min:sec counter begins to decrement
from 00:20, while POWER increases to 20%. At time 00:00 the state
message changes to SOAK TIME 1 while the counter begins to decrement
from 00:10. Upon reaching time 00:00, the state message again changes to
RISE TIME 2.
11
RISE TIME 2 begins to decrement from time 00:15 while POWER increases
to 35%. Upon reaching time 00:00, the state message changes to SOAK
TIME 2 and the time again begins to decrement from time 00:10. At time
00:00 the state message changes to DEPOSIT.
12
Once in DEPOSIT, the time begins to increment and the deposition rate will
be 16.1Å/s. The THICK SPT annunciator is displayed and power is at 36%.
Upon reaching the FINAL THK parameter of 2.000kÅ, deposition stops with
an elapsed time of 02:03. The clock immediately begins counting up from
00:00. The FINAL THK annunciator is displayed.
13
The instrument is now in IDLE PWR and will remain in this mode until
START is pressed.
14
When START is pressed, the process will repeat steps 12 through 14.
NOTE: If IDLE PWR is reprogrammed to 0, the process will begin at RISE
TIME 1.
15
After successful completion of the above steps, power down the instrument
to leave the TEST mode by turning configuration switch 1 "OFF" and then
placing the unit first in STBY and then "ON" to read the new configuration.