INFICON XTC/C Thin Film Deposition Controller - Manual (Page 36)

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XTC/C - XTC/2 Operating Manual
2.3 Installation Guide and Schematic
Many experienced deposition monitor users will be able to fully install and use
the instrument by studying the installation schematic,
Figure 2-5 on the next
page, and the State Sequence Diagrams, Figure 4-2 on page 4-2 , Figure 4-3 on
page 4-3 , Figure 4-4 on page 4-4 , and Figure 4-5 on page 4-5 .
A more systematic approach would be to start by reviewing the two figures and
then following the procedure below.
WARNING
Completely review section 1.1 on page 1-1 on safety.
All warnings in this section, as well as ones found in
other sections listed below, must be followed to ensure
the safety of the personnel operating this instrument.
1 Check for correct line voltage, section 2.2 on page 2-4 .
2 Verify basic unit operation by exercising it in the Test Mode, section 3.6 on
page 3-11 .
3 Review the system interface capability as outlined in section 2.6 on page
2-18 . Be especially attentive of the special features available on the
configuration switches, section 2.6.2 on page 2-19
4 Wire the necessary connectors following the installation procedures in
sections
section 3.1 on page 3-1 , section 3.2 on page 3-1 , and section 3.3
on page 3-4 .
5 Review the front panel controls and display description per section 2.4 on
page 2-10 for the XTC/2 or section 2.5 on page 2-16 for the XTC/C.
6 Program the desired film parameter values per section 4.1 on page 4-1 and
section 4.2 on page 4-6 .
7 Verify the operation of the just programmed film utilizing the Test Mode.
8 Attach the XIU (757-305-G15, G30, or G100) to an existing transducer or
install a new transducer following the guidelines of
section 3.5 on page 3-7
and Figure 3-3 on page 3-8 .
9 Exit the Test Mode and deposit when ready.