INFICON XTC/C Thin Film Deposition Controller - Manual (Page 80)

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XTC/C - XTC/2 Operating Manual
5 9,10 Stop When a stop condition
is generated, see
section 4.3.2 on page
4-9
, section 4.3.1 on
page 4-9 , and section
2.6.2 on page 2-19
When stop
condition is cleared
6 11,12 End of Process When last layer of the
process reaches the
IDLE state. The the start of
next process.
** Function may be overwritten by Remote Communications Commands R15 - R18,
see
section 3.8.5 on page 3-26 .
Table 3-4 Aux I/O Connector
Relay # Pin # Function** Closed Contacts Open Contacts
7 1,2 Thickness Set
Point THK SPT exceeded
for two consecutive
measurements Entry of IDLE state
or
End of Film When layer reaches
the idle state On a RESET or
START of the next
layer
8 3,4 Feedtime (Soak 2) During Soak 2 Balance
9 5,6 Crystal Fail When all crystals have
been consumed When crystal fail
has been cleared
10 7,8 Alarms When alarm
conditions have been
triggered; see
section
4.3.1 on page 4-9 .
When alarm
condition ceases
or
In Process When a process is
started When in the STOP,
READY, or IDLE
states
11 9,10 Source 1/Source 2 At start of a layer
utilizing Source 1
(toggle) At start of layer
utilizing Source 2
Table 3-3 System I/O Connector (continued)
Relay # Pin # Function** Closed Contacts Open Contacts