INFICON XTC/C Thin Film Deposition Controller - Manual (Page 73)

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XTC/C - XTC/2 Operating Manual
Generally, install the sensor as far as possible from the evaporation source (a
minimum of 10" or 25.4 mm) while still being in a position to accumulate
thickness at a rate proportional to accumulation on the substrate.
Figure 3-4
shows proper and improper methods of installing sensors.
To guard against spattering, use a source shutter or crystal shutter to shield the
sensor during the initial soak periods. If the crystal is hit with even a minute
particle of molten material, it may be damaged and stop oscillating. Even in
cases when it does not completely stop oscillating, it may become unstable.
Figure 3-4 Sensor Installation Guidelines
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