INFICON XTC/C Thin Film Deposition Controller User Manual
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XTC/C - XTC/2 Operating Manual
Table 2-2 Configuration Switch Settings
XTC/2
XTC/C
Switch 1
Test Mode
(0 = off, 1 = on)
Communications
Address
(2
4
)
Switch 2
Parameter Lock
(0 = off, 1 = on)
Communications
Address
(2
3
)
Switch 3
Control Mode
(0 = deposit, 1 = etch) Communications
Address
(2
2
)
Switch 4
Stop On Alarms
(0 = no, 1 = yes)
Communications
Address
(2
1
)
Switch 5
Stop on Max Power
(0 = no, 1 = yes)
Communications
Address
(2
0
)
XTC/C Switches 1-5 are only used for the optional IEEE488 (IPN 760-142-G1 or 757-122-G1).
[Addresses 0 to 30 are allowed.]
Switch 6
Recorder Type MSB
Communications Protocol
0 = INFICON, 1 = SECS
Switch 7
Recorder Type
Baud Rate MSB
Switch 8
Recorder Type LSB
Baud Rate LSB
NOTE: for the XTC/2
000 designates Rate, 100 Å/s full scale (unfiltered)
001 designates Rate, 1000 Å/s full scale (unfiltered
010 designates Thickness, 100 Å full scale
011 designates, 1000 Å full scale
100 designates Power %
101 designates Rate Deviation (±50 Å/s)
110 designates Rate 100 Å/s full scale - smoothed
111 designates Rate 1000 Å/s full scale - smoothed
NOTE: for the XTC/C
00 is 9600 baud
01 is 4800 baud
10 is 2400 baud
11 is 1200 baud
Switch 9
Beep On/Off
(0=on, 1=off)
Checksum
(0 = no, 1 = yes)
Switch 10
Backlight Dim
(0 = no, 1 = yes)
Unused
Switch 11
Start Layer without
backup crystal
(0 = no, 1 = yes)
Start Layer
without backup
crystal
0 = no, 1 = yes)
NOTE: See
for description