INFICON XTC/C Thin Film Deposition Controller User Manual
Page 77
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XTC/C - XTC/2 Operating Manual
6
Refer to the list of parameters in
Table 3-2
and enter the data
as they are given.
7
When the correct sequence of numerals appear in the flashing display,
press the key to enter and store the data.
8
Press the PROG key to exit the program display.
9
Press START to begin the programmed sequence.
Table 3-2 Operational Test Parameters
RISE TIME 1
00:20
min:sec
SOAK PWR 1
20
%
SOAK TIME 1
00:10
min:sec
RISE TIME 2
00:15
min:sec
SOAK PWR 2
35
%
SOAK TIME 2
00:10
min:sec
SHUTR DLY
N
Y:N
NEW RATE
00.0
Å/sec
R RAMP TIME
00:0
min:sec
IDLE RAMP
00:00
min:sec
IDLE PWR
02
%
TIME PWR
N
Y:N
XTAL SWCH S
0
XTAL SWCH Q
0
TOOL FACT 1
110.0
%
TOOL FACT 2
100.0
%
DEP RATE
16.2
Å/sec
FINAL THK
2.000
kÅ
THICK SPT
0.000
kÅ
DENSITY
02.73
gm/cc
Z-RATIO
1.000
SENSOR #
1
SOURCE #
1
CRUCIBLE #
0
CTL GAIN
10
Å/sec / %
CTL TC
5
sec
CTL DT
0.1
sec
MAX PWR
50
%
SAMPLE 5
%
HOLD TIME
00:00
min:sec