INFICON XTC/C Thin Film Deposition Controller - Manual (Page 23)

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XTC/C - XTC/2 Operating Manual
1.3.1.4 Input/Output
Inputs . . . . . . . . . . . . . . . . . . . . . . 9 TTL inputs
Outputs
a) relay . . . . . . . . . . . . . . . . . . 12 SPST 2.5-amp relays rated
@ 30 V(dc) / 30 V(ac) / 42 V(peak) max.
b) crucible select . . . . . . . . . . . 8 open collector
(5 volt DC max sink, 5 TTL loads)
Scan/Change Rate . . . . . . . . . . . . 4 Hz
1.3.1.5 Recorder Output
Voltage . . . . . . . . . . . . . . . . . . . . . 0 to +10 v
Resolution . . . . . . . . . . . . . . . . . . 13 bits over full range
(one reserved for sign)
Update Rate . . . . . . . . . . . . . . . . . 4 Hz
Function . . . . . . . . . . . . . . . . . . . . Rate / Thickness / Mass
Maximum Load . . . . . . . . . . . . . . . 2.0 KOhm (100 Ohm internal impedance)
1.3.1.6 Display
Applies to XTC/2 only; the XTC/C provides LED annunciators.
Type . . . . . . . . . . . . . . . . . . . . . . . 4x multiplexed custom LCD with backlight.
If desired, backlight automatically dims
during prolonged period of inactivity,
automatically brightening when activity
begins.
Thickness Resolution . . . . . . . . . . 1 Å
Rate Resolution . . . . . . . . . . . . . . .1 Å for 1 to 99.9 Å/sec
1 Å for 100 to 999 Å/sec
Update Rate . . . . . . . . . . . . . . . . . 1 Hz
1.3.1.7 Process Recipe Storage
Film Programs . . . . . . . . . . . . . . . 9, 30 variables per program
Process layers . . . . . . . . . . . . . . . 3