INFICON XTC/C Thin Film Deposition Controller - Manual (Page 26)

1 - 10
IP
N 07
4-
18
3X
XTC/C - XTC/2 Operating Manual
1.4 Guide to the Use of the Manual
This manual is configured to be used by both experienced and inexperienced
deposition process engineers. For those with significant experience, especially
on INFICON controllers, nearly all pertinent information is contained in
Chapter
2, Quick Use Guide . Other sections contain the details that supplement the
information in the quick use section.
Every user should read the complete manual. It is strongly suggested that the
user or installer follow the following plan to gain the most information in the
shortest period of time.
Š Register the instrument to receive updates and important information from
the factory.
Š Read section 1.1.1, Notes, Cautions, Warnings, on page 1-1 to understand
the safety related issues.
Š Read Chapter 2, Quick Use Guide , to become familiar with the instrument’s
needs and capabilities. Use the other sections of the manual to supplement
areas where you do not feel you have an adequate understanding of the
material. Throughout
Chapter 2 there will be frequent references to the
manual sections that provide more detailed information. The final sections
of the
Chapter 2 build the understanding of the full use of the instrument in
a logical progression, as suggested in section 2.3 on page 2-8 .
1.5 XTC/C Users and Installers Note
The XTC/C can do anything that an XTC/2 can do, but it must be controlled
through the computer interface. In order to install and use this instrument
effectively, all aspects of XTC/2 operation must be understood. Because of this
additional burden, it is probably not cost effective for an end-user of a single
unit to purchase and install the XTC/C version.
WARNING
There are no user serviceable components within the
instrument case.
Potentially lethal voltages are present when the line
cord, System I/O or Aux I/O are connected.
Refer all maintenance to qualified personnel.