Appendix a table of densities and z-ratios, Appendix a, Appendix a, table of densities and – INFICON XTC/C Thin Film Deposition Controller User Manual
Page 173: Z-ratios, Table of densities and, Z-ratios, see appendix a
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XTC/C - XTC/2 Operating Manual
Appendix A
Table of Densities and Z-ratios
The following table represents the content of the instrument's material library.
The list is alphabetical by chemical formula.
CAUTION
Some of these materials are toxic. Please consult the
material safety data sheet and safety instructions
before use.
Remote Communications Responses and Commands use the code value to
represent a specific material. An * is used to indicate that a Z-ratio has not been
established for a certain material. A value of 1.000 is defaulted in these
situations.
Table A-1 Material Table
Formula
Density
Z-ratio
Material Name
Ag
10.5000
0.529
Silver
AgBr
6.470
1.180
Silver Bromide
AgCl
5.560
1.320
Silver Chloride
Al
2.700
1.080
Aluminum
Al
2
O
3
3.970
0.336
Aluminum Oxide
Al
4
C
3
2.360
*1.000
Aluminum Carbide
AIF
3
3.070
*1.000
Aluminum Fluoride
AIN
3.260
*1.000
Aluminum Nitride
AlSb
4.360
0.743
Aluminum Antimonide
As
5.730
0.966
Arsenic
As
2
Se
3
4.750
*1.000
Arsenic Selenide
Au
19.300
0.381
Gold
B
2.370
0.389
Boron
B
2
O
3
1.820
*1.000
Boron Oxide
B
4
C
2.370
*1.000
Boron Carbide
Ba
3.500
2.100
Barium
BaF
2
4.886
0.793
Barium Fluoride
BaN
2
O
6
3.244
1.261
Barium Nitrate
BaO
5.720
*1.000
Barium Oxide