INFICON XTC/C Thin Film Deposition Controller - Manual (Page 75)

3 - 11
IP
N 07
4-
18
3X
XTC/C - XTC/2 Operating Manual
3.5.3 Check List for Transducer Installation
Š Mount the sensor to something rigid and fixed in the chamber. Do not rely
on the water tubes to provide support.
Š Plan the installation to insure that there are no obstructions blocking the
path between the Sensor and the Source. Be certain to consider rotating or
moving fixtures.
Š Install sensors so their central axis (an imaginary line drawn normal to the
center of the crystal’s face) is aimed directly at the virtual source being
monitored.
Š Be sure there is easy access for the exchange of crystals.
Š For systems employing simultaneous source evaporation (co-dep), try to
locate the sensors so the evaporant from each source is only flowing to one
sensor. This is not generally possible to do without special shielding or
optional "material directors" for the transducers.
Š The use of water cooling is always recommended, even at very low heat
loads and low rates.
Š If penetrating a cryogenic shroud, be sure that the cooling water is kept
flowing or drained between uses. Failure to do so could cause the water to
freeze and the water tubing to rupture.
Š Avoid running cold water tubes where condensation can drip into the
feedthroughs. This condensate can effectively short the crystal drive
voltage, causing premature crystal failure.
3.6 Use of the Test Mode (XTC/2 Only)
This instrument contains a software controlled test mode which simulates
actual operation. The purpose of the Test Mode is to verify basic operation and
for demonstrating typical operation to the technician.
The Rate displayed during Test Mode operation is determined as follows:
[1]
All relays and inputs operate normally during Test Mode operation.
Displayed Rate
40
DENSITY (gm/cc)
--------------------------------------------------
TOOLING (%)
100%
----------------------------------------
Ч
·
Е/sec =