INFICON XTC/C Thin Film Deposition Controller User Manual
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XTC/C - XTC/2 Operating Manual
Switch 12
Input Option
0 = standard
1 = film select
Unused
Switch 13
Relay Option
1 = on
Relay 7 = End of Film
Relay 10 = In Process
1 = on
Relay 7 = End of Film
Relay 10 = In Process
0 = off
Relay 7 = Thickness Setpoint
Relay 10 = Alarms
0 = off
Relay 7 = Thickness Setpoint
Relay 10 = Alarms
Switch 14
Crystal Switch Type MSB
Crystal Switch Type MSB
Switch 15
Crystal Switch Type LSB
Crystal Switch Type LSB
NOTE:
00 designates single head(s)
01 designates one dual head
10 designates one CrystalSix, on SENSOR 1
11 designates two CrystalSixs
Switch 16
Source Control
Voltage polarity 0 = neg, 1 = pos
Source Control
Voltage polarity 0 = neg, 1 = pos
Table 2-2 Configuration Switch Settings
XTC/2
XTC/C
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