A - 5 – INFICON XTC/C Thin Film Deposition Controller User Manual
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XTC/C - XTC/2 Operating Manual
Lu
9.840
*1.000
Lutetium
Mg
1.740
1.610
Magnesium
MgAl
2
O
4
3.600
*1.000
Magnesium Aluminate
MgAl
2
O
6
8.000
*1.000
Spinel
MgF
2
3.180
0.637
Magnesium Fluoride
MgO
3.580
0.411
Magnesium Oxide
MgO
3
Al
2
O
3
8.000
*1.000
Spinel
Mn
7.200
0.377
Manganese
MnO
5.390
0.467
Manganese Oxide
MnS
3.990
0.940
Manganese (ll) Sulfide
Mo
10.200
0.257
Molybdenum
Mo
2
C
9.180
*1.000
Molybdenum Carbide
MoB
2
7.120
*1.000
Molybdenum Boride
MoO
3
4.700
*1.000
Molybdenum Trioxdide
MoS
2
4.800
*1.000
Molybdenum Disulfide
Na
0.970
4.800
Sodium
Na
3
AIF
6
2.900
*1.000
Cryolite
Na
5
Al
3
F
14
2.900
*1.000
Chiolite
NaBr
3.200
*1.000
Sodium Bromide
NaCl
2.170
1.570
Sodium Chloride
NaCIO
3
2.164
1.565
Sodium Chlorate
NaF
2.558
0.949
Sodium Fluoride
NaNO
3
2.270
1.194
Sodium Nitrate
Nb
8.578
0.492
Niobium (Columbium)
Nb
2
O
3
7.500
*1.000
Niobium Trioxide
Nb
2
O
5
4.470
*1.000
Niobium (V) Oxide
NbB
2
6.970
*1.000
Niobium Boride
NbC
7.820
*1.000
Niobium Carbide
NbN
8.400
*1.000
Niobiunn Nitride
Nd
7.000
*1.000
Neodynium
Nd
2
O
3
7.240
*1.000
Neodynium Oxide
NdF
3
6.506
*1.000
Neodynium Fluoride
Ni
8.910
0.331
Nickel
Table A-1 Material Table (continued)
Formula
Density
Z-ratio
Material Name