INFICON XTC/C Thin Film Deposition Controller - Manual (Page 83)

3 - 19
IP
N 07
4-
18
3X
XTC/C - XTC/2 Operating Manual
3.7.3 Chart Recorder
The chart recorder output has 12 bit resolution with one additional bit of sign
information over the range of -10 to +10 volts. It can supply up to 5 milliamps
and has an internal resistance of 100 ohms. The output is proportional to rate,
thickness or rate deviation depending on the setting of the XTC/2’s
configuration switches; see
section 2.6.2 on page 2-19 . The XTC/C’s default
recorder function is 0-100 Å/sec rate and is changed by sending the R 38
command,
page 3-33 . It is normal for ripple to appear on these outputs to a
maximum of 5 mV at ~84 Hz. This output is updated every 250 milliseconds.
Configuration switch #12 set for "Film Select" Input Option:
4 21 RESET
5 22 Select Film MSB
6 23 Select Film
7 24 Select Film
8 25 Select Film LSB
13 Input Common
(GND) Used as a reference for activating any
of the inputs.
9 14 CRUCIBLE VALID Application of a ground reference
voltage from the crucible rotation
mechanism is used to signal that the
proper crucible has indexed into
position and state sequencing may
proceed.
15,16,17 Input Common
(GND) Used as a reference for activating any
of the inputs.
Table 3-6 System I/O Connector (continued)
Input # Pin # Function Description