INFICON XTC/C Thin Film Deposition Controller - Manual (Page 44)

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XTC/C - XTC/2 Operating Manual
20— PROGRAMMING and PHASE INDICATOR GROUP
Annunciators and cursors for navigating, displaying and changing a film’s
individual parameter values when the display is in the Program mode.
The annunciators are also used to indicate the current state of the film
being executed when the display is in the Operate mode.
2.5 XTC/C Front Panel Description
Figure 2-9 Front Panel XTC/C
1— READY
When the associated LED is illuminated the instrument is in the READY TO
START state.
2— PROCESSING
When the associated LED is illuminated the instrument is state executing
a layer. See
Figure 4-2 on page 4-2 .
3— STOP
When the associated LED is illuminated the instrument is in the STOP
state.
4— XTAL FAIL
When the associated LED is illuminated the measurement crystal has
failed. In the case of units configured for dual or CrystalSix operation it
indicates that there are no further crystals available.
5— RECEIVE
When the associated LED is illuminated the instrument is receiving
information from the connected computer controller.
6— SEND
When the associated LED is illuminated the instrument is sending
information to the connected computer controller.
7— CPU
When the associated LED is illuminated the instrument’s computer is not
operating normally.
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