INFICON XTC/C Thin Film Deposition Controller - Manual (Page 42)

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XTC/C - XTC/2 Operating Manual
9— POWER and PROCESS GROUP
Indicates the relative source power when the display is in the Operate
mode and displays the % xtal life when the LIFE key is pressed. When the
display is in the Program mode, these three digits are used for the entry of
some 3 digit film parameter values. It is also used to define the instrument’s
sequencing of multi-layers, see
section 2.9 on page 2-36 .
10— SENSOR and SOURCE SUBGROUP
The annunciators and cursors for the definition of a film’s:
a. SENSOR # — designates the active or primary (for dual head) sensor
as 1 or 2.
b. SOURCE # — designates the film’s active source control output
as 1 or 2.
c. CRUCIBLE # — designates the active film’s crucible pocket as 1-8,
corresponding to crucible select outputs 1-8. A value of 0 disables this
parameter and associated outputs; see
section 2.6.5 on page 2-24 .
11— CONTROL PARAMETER SUBGROUP
The annunciators and cursors for entering the values used in a film’s Rate
Control algorithm; see
section 4.5 on page 4-11 .
12— CRYSTAL and PROCESS SUBGROUP
When the display is in the Program mode:
a. the XTAL SWCH parameter’s values are entered for S & Q as labeled.
b. the "FILM #" parameter value defines the particular film’s (1-9) values
being programmed/displayed.
c. The "LYR #" defines the process layer to be assigned a film. This
parameter works with the power and process display group.
When the display is in the Operate mode:
a. "FILM #" parameter value defines the film being executed and the
"LAYER #" parameter value defines the layer being executed.
13— TIMER GROUP
When the display is in the Operate mode, serves as the elapsed time
indicator and unit annunciator. Also displays S & Q values when the LIFE
key is pressed. The values in the S accumulator replace the time display
while the LIFE key is pressed. When the key is released the value of the Q
accumulator is shown for about 1 second. Used for entering and displaying
the value of time-based parameters when the display is in the Program
mode.
14— CALIBRATION SUBGROUP
Annunciators and cursors used when the display is in the Program mode.
Allows conversion of the crystal’s frequency shift to material thickness; see
section 5.1 on page 5-1 through section 5.4 on page 5-3 .