INFICON XTC/C Thin Film Deposition Controller - Manual (Page 67)

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XTC/C - XTC/2 Operating Manual
CAUTION
An external ground connection is required to ensure
proper operation, especially in electrically noisy
environments.
When used with RF powered sputtering systems, the grounding scheme may
have to be modified to optimize the specific situation. An informative article on
the subject of "Grounding and RFI Prevention" was published by H.D. Alcaide,
in "Solid State Technology", p 117 (April, 1982).
3.2.3 Minimizing Noise Pickup from External Cabling
When an instrument is fully integrated into a deposition system, there are many
wire connections; each a potential path for noise to be conducted to the inside.
The likelihood of these wires causing a problem can be greatly diminished by
using the following guidelines:
Š Use shielded coax cable or twisted pairs for all connections.
Š Minimize cable lengths by centralizing the controller.
Š Avoid routing cables near areas that have the potential to generate high
levels of electrical interference. For example, large power supplies, such as
those used for electron beam guns or sputtering sources, can be a source
of large and rapidly changing electro-magnetic fields. Placing cables as little
as one foot (30 cm) from these problem areas can be a very significant
improvement.
Š Be sure that a good ground system and straps are in place as
recommended above.
Š Ensure that all instrument covers and option panels are in place and tightly
secured with the provided fasteners.