INFICON Cygnus Thin Film Deposition Controller User Manual
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Cygnus Operating Manual
EXTERNAL IN ###
Designates a hardware input which, when it changes state, can be used to
trigger an Action. Inputs can be given names up to 10 characters long. Inputs
are activated by pulling the specific input’s terminal to ground (<0.8 V) through
a contact closure to common (GND) or with TTL/CMOS logic having current
sink capability of 2 mA (1 low power TTL load).
IDLE RAMP ###
Sets the logic condition to be true at the start of Idle Ramp for the designated
Channel, or for any Channel if 0 is entered for the Channel ###. The condition
remains true until the end of Idle Ramp.
MANUAL ###
Sets the logic condition to be true when the Manual state is entered for the
designated Channel, or for any Channel if 0 is entered for the Channel ###. The
condition remains true until leaving the Manual state.
MAXIMUM PWR ###
Sets the logic condition to be true as long as the designated source is at
Maximum Power. If 0 is entered it will apply to any channel. The condition
remains true until the designated source is less than Maximum Power.
MINIMUM PWR ###
Sets the logic condition to be true as long as the designated source is at
Minimum Power while the source is in either the Deposit state or the
Non-Deposit Control state. If 0 is entered it will apply to any channel. The
condition remains true until the designated source is greater than Minimum
Power.
NONDEP CNTL ###
This Event is evaluated true if the designated Channel is in the Non-Deposit
Control state, i.e. there is rate control with the substrate shutter closed. If 0 is
selected it will apply to any Channel. The condition remains true until the end
of the Non-Deposit Control state.
NONDEP HOLD ###
This function is similar to Time Power except the substrate shutter for the
designated source is closed and there is no determinant end point. If 0 is
selected it will apply to any Channel. The condition remains true until the state
is exited, for example when a Stop command is given.
READY ###
Sets the logic condition to be true as long as the designated Channel is in the
READY state. If 0 is selected it will apply to any Channel.