INFICON Cygnus Thin Film Deposition Controller - Manual (Page 59)

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Cygnus Operating Manual
2.6 State Descriptions
Table 2-1 State Descriptions
STATE CONDITION RELAY CONTACT
STATUS
Substrate
Shutter Sensor
Shutter
NOTE: The following are Pre-Deposit states.
READY Cygnus will accept a START command
Thickness is not incremented Inactive Inactive
CRUCIBLE SWITCH Instrument advances to next state when
“turret” input is low, or “turret” delay has
elapsed. If IDLE PWR of the channel using
this source is not equal to zero, power is
set to zero before the crucible position
changes. Inactive Inactive
RISE TIME 1 1 Source is rising to Soak Power 1 level. Inactive Inactive
SOAK TIME 1 1 Source is being maintained at Soak Power
1 level. Inactive Inactive
1 Rise Time 1 and Soak Time 1 will be skipped and the channel will start with the
Rise Time 2 state if Idle Power is set to a non-zero value and the channel is currently
at Idle at this non-zero Idle Power.
RISE TIME 2 Source is rising to Soak Power 2 level. Inactive Inactive
SOAK TIME 2 Source is being maintained at Soak Power
2 level. Inactive Inactive 2
2 If a channel is linked to another due to crosstalk correction, that channel’s Sensor Shutter will
become active during Soak Time 2 if the linked channel is in Deposit.
NOTE: The following are Deposit states.
DEPOSIT Thickness is zeroed on entry. Rate
control, substrate shutter relay active. Active Active 3
NONDEP CONTROL Rate control, substrate relay contact
inactive. Thickness is not incremented Inactive Active 3
3 RateWatcher in Delay and Sample will have the sensor shutter active. RateWatcher in Hold will
have the sensor shutter inactive.
NONDEP HOLD Power held constant due to a crystal
failure. Inactive Inactive
MANUAL Source power controlled by hand-held
controller. Active Active
TIME-POWER Crystal failed; source maintained at
average control power prior to crystal
failure. Active or
Inactive Active