INFICON Cygnus Thin Film Deposition Controller - Manual (Page 227)

Index - 3
IP
N 07
4-
37
9-
P1
K
Cygnus Operating Manual
S
safety 1-2
Sales and Customer Service 1-6
secondary tooling 3-3
sensor
diagnosing problems 8-13
emulator 8-13
installation 6-3
maintenance 2-11
selection 6-2
type 6-1
serial communication 6-13
series resonance 9-8
Service Center 1-6
source control connection 6-10
source/crucible selection 2-26
spattering 6-4
specifications 1-7
spreadsheet program 2-32
spurious shift 9-10
state descriptions 2-23
status code 5-24
T
Technical Support 1-6
test mode 2-29
thickness
shear mode 9-2
twist mode 9-2
timers 4-16
tooling 7-1 , 7-2
tooling determination 7-2
troubleshooting 8-8
computer communication 8-18
transducers/sensors 8-13
turret source crucible selection 2-26
U
update
input names 5-18
logic statements 5-19
output names 5-23
V
voltage
input 6-8
W
windup 9-14
X
XIU cable routing 6-10
Z
Z-Match 9-5
Z-Match equation 9-5
Z-Ratio 7-1 , 7-3 , 9-9