INFICON Cygnus Thin Film Deposition Controller - Manual (Page 125)

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Cygnus Operating Manual
Table 5-6 shows Event Codes in HEX notation.
 "s" indicates Channel Number: 0 to 6
 "n" indicates Channel Number: 1 to 6
Table 5-6 Event Codes
Name Description Normal Negated
External In x External Input x (x = 1 to 28) 0x41 0xBF
Crucible SW s Crucible Switch s 0x42 0xBE
Rise 1 s Rise 1 s 0x43 0xBD
Soak 1 s Soak 1 s 0x44 0xBC
Rise 2 s Rise 2 s 0x45 0xBB
Soak 2 s Soak 2 s 0x46 0xBA
Deposit s Deposit s 0x47 0xB9
NonDep Cntl s Non Deposit Control s 0x48 0xB8
Time Power s Time Power s 0x49 0xB7
NonDep Hold s Non Deposit Hold s 0x4A 0xB6
Idle Ramp s Idle Ramp s 0x4B 0xB5
Ready s Ready s 0x4C 0xB4
Stop s Stop s 0x4D 0xB3
Substr Shtr s Substrate Shutter s 0x4E 0xB2
Manual s Manual s 0x4F 0xB1
Thick Limit n
xxx.xxx
Thickness Limit n xxx.xxx kÅ
(see note 1)
0x50 0xB0
Timer HH:MM x xx:xx Timer Limit HH:MM x xx:xx
(x = 1 to 20, xx:xx is valid time)
(see note 2)
0x51 0xAF
Timer SECS x xxx.x Timer Limit Sec x xxx.x
(x = 1 to 20, xxx.x is valid time)
(see note 3)
0x52 0xAE
Counter Limit x xxx Counter x xxx
(x = 1 to 20, xxx = 0 to 999)
0x53 0xAD
Statement x Logic Statement x (x = 1 to 100) 0x54 0xAC
Comp Cntl Computer Control 0x55 0xAB
Xtal Fail s Crystal Fail s 0x56 0xAA