INFICON Cygnus Thin Film Deposition Controller - Manual (Page 116)

5 - 12
IP
N 07
4-
37
9-
P1
K
Cygnus Operating Manual
9
(0x09)
Crystal Stability Int 0 9
10
(0x0a)
Maximum
Power
% float 0.01 99.99
11
(0x0b)
Minimum
Power
% float 0.00 99.98
12
(0x0c)
Soak Power 1 % float 0.00 99.99
13
(0x0d)
Rise Time 1 sec
See Note 4
Int 0 5999
(99:59)
14
(0x0e)
Soak Time 1 sec
See Note 4
Int 0 5999
(99:59)
15
(0x0f)
Soak Power 2 % float 0.00 99.99
16
(0x10)
Rise Time 2 sec
See Note 4
Int 0 5999
(99:59)
17
(0x11)
Soak Time 2 sec
See Note 4
Int 0 5999
(99:59)
18
(0x12)
Idle Power % float 0.00 99.99
19
(0x13)
Idle Ramp
Time
sec
See Note 4
Int 0 5999
(99:59)
20
(0x14)
Rate A/sec float 0.000 999.9
21
(0x15)
Final
Thickness
kA float 0.000 999.9
22
(0x16)
On Final
Thickness
0 = NonDep Control
1 = Idle Ramp
2 = Continue
Int 0 2
23
(0x17)
Crystal Fail
Option
0 = Time Power
1 = Idle Ramp
2 = Stop
Int 0 2
Table 5-4 Channel Parameters (continued)
Channel
Command
ID Name
Units / Allowed
Values / Notes
Data
Type Low Limit High Limit